公开(公告)号：JPH11203937A

公开(公告)日：1999-07-30

申请号：JP28506998

申请日：1998-10-07

Applicant: IBM

Inventor： ANGELOPOULOS MARIE ,  JAMES JOSEPH BUCCHINYAANO ,  KAREN E PETORIIRYO

IPC: G03C1/89 ,  G03F7/004 ,  G03F7/038 ,  H01B1/12 ,  H05K1/09

Abstract: PROBLEM TO BE SOLVED: To provide a conductive polymer composition having a controlled pH, a structural body containing it and its manufacturing method. SOLUTION: This structural body has a surface and multiple layers on the surface; at least one of the multiple layers is formed from an energy sensitive material, at least one of other layers is formed from a conductive polymer, and this conductive polymer contains an acid functional group and has a predetermined pH. The pH is controlled by an additive agent mixed into the conductive polymer or a constituent of the conductive polymer. The conductive polymer is preferably the top layer. The structural body can avoid the influence of charge due to electron beams on a resist in fabricating microelectronics and is useful for lithography. This composition is also useful for application examples such as static discharge, electromagnetic interference shielding, corrosion prevention, electroplating and wiring.