公开(公告)号：US3645545A

公开(公告)日：1972-02-29

申请号：US3645545D

申请日：1970-07-30

Applicant: IBM

Inventor： GARNACHE RICHARD R ,  KENNY DONALD M

IPC: C30B31/10 ,  H01L21/677 ,  B65D53/00

CPC classification number: H01L21/67173 ,  C30B31/106 ,  Y10S277/906

Abstract: An atmospheric isolation device for separation of two atmospheres of a continuous semiconductor processing apparatus which includes a gas entry tube, a plurality of first gas restricting means leading to a first atmosphere, a plurality of second gas restricting means leading to a second atmosphere, and adjacent to each gas restricting means an expansion chamber for increasing back pressure and for destroying lift produced by the Bernouilli effect of the gas passing through the restricting means.

Abstract translation: 一种用于分离连续半导体处理装置的两个气氛的大气隔离装置，包括气体入口管，通向第一气氛的多个第一气体限制装置，通向第二气氛的多个第二气体限制装置，以及相邻的 每个气体限制装置是用于增加背压并破坏由通过限制装置的气体的伯努利效应产生的升力的膨胀室。