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公开(公告)号：AT515796T
公开(公告)日：2011-07-15
申请号：AT09757447
申请日：2009-05-28
Applicant: IBM
Inventor： ANDERSON BRENT , NOWAK EDWARD , KU SUK
IPC: H01L21/8238 , H01L21/336 , H01L21/762 , H01L29/78
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