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公开(公告)号：DE3475245D1
公开(公告)日：1988-12-22
申请号：DE3475245
申请日：1984-05-09
Applicant: IBM
Inventor： LANGNER GUNTHER O , PFEIFFER HANS C , STURANS MARIS A
IPC: G03C7/20 , G03F7/20 , H01J37/10 , H01J37/141 , H01J37/147 , H01J37/153 , H01L21/027 , H01J37/30
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