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公开(公告)号：DE1266839B
公开(公告)日：1968-04-25
申请号：DEJ0030856
申请日：1966-05-17
Applicant: IBM
Inventor： CLARK KENDALL , BECK GEORGE CLAYTON , CREIGHTON EUGENE JOSEPH , TURRIS FRANK LOUIS DE , DROP JOSEPH GEORGE , GODAT JEAN JOSEPH LOUIS , LARSEN ARNE HIENRICH , RAJAC THOMAS JOHN , JUN GEORGE RICHARD SANTILLO , SCHUELKE WALTER JOSEPH
IPC: H01L21/00 , H01L21/683 , H05K13/04 , H05K7/06
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