公开(公告)号：CA1190082A

公开(公告)日：1985-07-09

申请号：CA424282

申请日：1983-03-23

Applicant: IBM

Inventor： LEVENSON MARC D

IPC: G03F1/00 ,  G03F7/20 ,  H01L21/027 ,  G03F5/00

Abstract: PHASE-SHIFTING PRODUCTION MASK FOR PHOTOLITHORAPHY A phase-shifting mask for use in photolithography with incident light which is at least partially coherent is provided by positioning a transparent material over or under every other transmitting region of the mask. The transparent material has an index of refraction n and a thickness d such that (n-1)d=.PHI..lambda. where .lambda. is the wave length of the incident light, and .PHI. is a fraction between 1/4 and 3/4. 1/4 and 3/4.

公开(公告)号：CA1208930A

公开(公告)日：1986-08-05

申请号：CA457031

申请日：1984-06-20

Applicant: IBM

Inventor： BJORKLUND GARY C ,  LEVENSON MARC D

IPC: G01J3/447 ,  G01J3/10 ,  G01J3/42 ,  G01J3/433 ,  G01J9/04 ,  G01N21/19 ,  G01N21/27

Abstract: FREQUENCY MODUEATION-POLARIZATION SPECTROSCOPY METHOD AND DEVICE FOR DETECTING SPECTRAL FEATURES A method and device for detecting dichroic and/or birefringent narrow spectral features in a sample is described. The method includes the steps of providing a beam of light having an optical frequency bandwidth which is narrow compared to the width of the narrow spectral feature and having a center frequency .omega.c which lies near the narrow spectral feature, polarization phase modulating a beam of light with a single RF frequency to provide a pure FM spectrum having upper and lower sidebands in which either the carrier and sidebands have been polarized differently with respect to one another, exposing the sample containing the narrow spectral feature to the polarized modulated light so that the FM sidebands probe the narrow spectral feature, polarization analyzing and then photodetecting the light emerging from the sample to detect a RF beat at the specific RF frequency used for the polarization phase modulation, and electronically monitoring the amplitude of the RF beat signal to indicate the strength of the narrow spectral feature. The device includes a polarization phase modulator and a polarization analyzer positioned on opposite sides of the sample. In a preferred embodiment the polarization phase modulator produces a frequency modulated optical spectrum with the sidebands polarized precisely orthogonal to the carrier.