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公开(公告)号:DE3376023D1
公开(公告)日:1988-04-21
申请号:DE3376023
申请日:1983-11-08
Applicant: IBM
Inventor: DIBBLE ERIC PAUL , LYNCH THOMAS EDMUND
Abstract: A low conductivity fluid mask in a predetermined fluid state is used as a mask in an electroplating jet system. Preferred is a deionized water mask. A first nozzle (18) applies to the workpiece (W) to be electroplated a masking fluid layer (29) covering selected regions or the complete workpiece. A second nozzle (1) applies the electroplating solution to the desired workpiece regions (M). If the complete workpiece was covered, the second jet pierces the masking layer (29) to plate the underlying exposed portions of said surface.