Method and device for in-line measurement of switching delay history effect in pd-soi technology
    1.
    发明专利
    Method and device for in-line measurement of switching delay history effect in pd-soi technology 有权
    用于在PD-SOI技术中开关延迟历史效应的在线测量的方法和装置

    公开(公告)号:JP2008064752A

    公开(公告)日:2008-03-21

    申请号:JP2007222062

    申请日:2007-08-29

    CPC classification number: H03K3/0315

    Abstract: PROBLEM TO BE SOLVED: To provide an in-line measurement technology of switching delay history effects in an integrated circuit device. SOLUTION: A pulse is sent out to a delay chain. The pulse is in effect synchronized with the signal of a ring oscillator. The delay chain and the ring oscillator, in effect, include the same gate up to a defined point on the ring oscillator, corresponding to a remote edge of the delay chain. When the pulse reaches the remote edge of the delay chain, at least one difference is measured between the number of gates which the edge of the signal in the ring oscillator crosses and the number of gates which the edge of the corresponding pulse in the delay chain crosses. One or plural switching histories at the integrated circuit device are decided, in accordance with at least the one measured difference at the number of gates which the edge of the signal and the corresponding pulse edge crosses. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供在集成电路装置中切换延迟历史效应的在线测量技术。

    解决方案:将脉冲发送到延迟链。 该脉冲与环形振荡器的信号同步。 延迟链和环形振荡器实际上包括与环形振荡器上的限定点相同的栅极,对应于延迟链的远端。 当脉冲到达延迟链的边缘时,在环形振荡器中信号的边沿相交的栅极数与延迟链中相应脉冲的边缘的栅极数量之间测量至少一个差值 跨越。 根据信号的边缘和对应的脉冲边缘相交的门数至少一个测量的差异来决定集成电路器件的一个或多个开关历史。 版权所有(C)2008,JPO&INPIT

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