公开(公告)号：DE69017613D1

公开(公告)日：1995-04-13

申请号：DE69017613

申请日：1990-10-24

Applicant: IBM

Inventor： BERENBAUM LEONARD ,  MCCORD MARK A

IPC: G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q30/02 ,  G01Q60/04 ,  G01Q60/24 ,  G01Q60/30 ,  G01R1/06 ,  G01R31/308 ,  H01J37/28 ,  G01R31/28

Abstract: An electrical probe which incorporates a scanning proximity microscope (9) for probing the sub-micron features of an integrated circuit (2). An optical microscope (6) is provided to find the general region of interest, and a piezoelectric tube scanner (10) which controls the position of the probe is disposed at an acute angle to the substrate (2), so as not to obscure the view of the optical microscope (6). A number of such probes may be located around the integrated circuit (2).

公开(公告)号：DE69017613T2

公开(公告)日：1995-10-05

申请号：DE69017613

申请日：1990-10-24

Applicant: IBM

Inventor： BERENBAUM LEONARD ,  MCCORD MARK A

IPC: G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q30/02 ,  G01Q60/04 ,  G01Q60/24 ,  G01Q60/30 ,  G01R1/06 ,  G01R31/308 ,  H01J37/28 ,  G01R31/28

Abstract: An electrical probe which incorporates a scanning proximity microscope (9) for probing the sub-micron features of an integrated circuit (2). An optical microscope (6) is provided to find the general region of interest, and a piezoelectric tube scanner (10) which controls the position of the probe is disposed at an acute angle to the substrate (2), so as not to obscure the view of the optical microscope (6). A number of such probes may be located around the integrated circuit (2).