Patent search ap:("IBM") AND inv:"MCDONOUGH GEORGE WILLIAM" Page 1

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发明专利
BIAS SPUTTER DEPOSITION APPARATUS AND ITS METHOD OF USE 未知

公开(公告)号：DE2964758D1

公开(公告)日：1983-03-17

申请号：DE2964758

申请日：1979-12-14

Applicant: IBM

Inventor： KENNEDY THOMAS NOLAN , MCDONOUGH GEORGE WILLIAM , LESTER WILLIAM CARL , MICHAELSON JOHN DANIEL

IPC: C23C14/34 , C23C14/35 , C23C14/38 , H01J37/34 , H01L21/203 , C23C15/00

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