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公开(公告)号：DE3678791D1
公开(公告)日：1991-05-23
申请号：DE3678791
申请日：1986-09-26
Applicant: IBM
Inventor： BUTTRY DANIEL ALAN , KROUNBI MOHAMAD TOWFIK , MELROY OWEN RALPH
IPC: C23F1/00 , C04B41/53 , C04B41/91 , H01L21/308 , H01L21/311 , H05K1/03 , H05K3/00 , H05K3/46 , H01L21/31
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