公开(公告)号：DE3479068D1

公开(公告)日：1989-08-24

申请号：DE3479068

申请日：1984-11-30

Applicant: IBM

Inventor： BURGESS ALLAN COLIN ,  MAGEE ROBERT ARTHUR ,  MELVIN GEORGE EDWARD

IPC: H01L21/48 ,  H01L23/544 ,  H05K1/02 ,  H05K1/03 ,  H05K3/00 ,  H05K3/46 ,  H01L23/54

Abstract: A method is disclosed for forming multilayer ceramic substrates from large area ceramic green sheets (10), each having an array of layer sites (11) thereon, by serially aligning each individual layer site with respect to a die cavity (48) and punching the aligned layer site into the die cavity to thereby stack the requisite number of aligned layer sites. Individual layer site alignment ensures that each layer site is aligned with respect to the die cavity so that the dimensional tolerances between layer sites on the large area green sheet are eliminated. Thus, as large a green sheet as is cost effective may be employed, notwithstanding the fact that dimensional distortions on the large area green sheet would preclude alignment of corresponding layer site vias on superimposed large area green sheets.

公开(公告)号：DE3468737D1

公开(公告)日：1988-02-18

申请号：DE3468737

申请日：1984-06-05

Applicant: IBM

Inventor： DARVES-BORNOZ YVES ,  MELVIN GEORGE EDWARD ,  RYAN MICHAEL GERALD ,  SAYLOR DENNIS LEE

IPC: G01V9/00 ,  G01B5/28 ,  G01B21/30 ,  G01B7/34

公开(公告)号：DE3275346D1

公开(公告)日：1987-03-05

申请号：DE3275346

申请日：1982-09-02

Applicant: IBM

Inventor： KRANIK JOHN ROBERT ,  MELVIN GEORGE EDWARD ,  MUELLER WOLFGANG FRIEDRICH

IPC: B28B11/12 ,  B21D28/00 ,  B26D7/18 ,  B26D7/22 ,  B30B5/02 ,  H05K1/03 ,  H05K3/00 ,  H05K13/00

公开(公告)号：DE3169993D1

公开(公告)日：1985-05-23

申请号：DE3169993

申请日：1981-08-19

Applicant: IBM

Inventor： DESAI KAMALESH SURYAKANT ,  MELVIN GEORGE EDWARD

IPC: G01N33/38 ,  H05K1/03 ,  H05K3/00 ,  H05K3/36 ,  G01N3/20

Abstract: The invention monitors solvent content in a ceramic green sheet (14). The green sheet is partially supported by rods (24, 26) so that a portion of the sheet is free to sag under the influence of gravity, with or without any additional force to enhance or minimize the sag. A sensor (32) measures the rate of sag of the portion of the sheet free to sag, and this rate of sag is compared to a correlation standard of rate of sag versus solvent content of green sheets to determine acceptability.