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公开(公告)号：JPH0546983B2
公开(公告)日：1993-07-15
申请号：JP21990486
申请日：1986-09-19
Applicant: IBM
Inventor： MERANII MINNCHII CHO , JON EDOWAADO KURONIN , UIRIAMU RESURII GASURII , KAATAA UERINGU KAANTA , BAABARA JIIN RUSAA , UIRIAMU JON PATORITSUKU , KYASARIIN ARISU PERII , CHAARUZU RANBAATO SUTANDOREI
IPC: H01L21/3205 , H01L21/302 , H01L21/304 , H01L21/3065 , H01L21/3213 , H01L21/768 , H05K3/04 , H05K3/10 , H05K3/46 , H01L21/90
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