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公开(公告)号：CH477764A
公开(公告)日：1969-08-31
申请号：CH1779965
申请日：1965-12-23
Applicant: IBM
Inventor： MERLIN GALE SMITH , EMANUEL STERN
IPC: H01J37/34 , H01L21/263 , H01L21/60 , H01L21/768 , H01L23/48 , H01L19/00
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