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公开(公告)号：US3366819A
公开(公告)日：1968-01-30
申请号：US52701566
申请日：1966-02-14
Applicant: IBM
Inventor： CROWDER BILLY L , MOREHEAD FREDERICK F , WAGNER PETER R
IPC: H01L33/00
CPC classification number: H01L33/00
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