公开(公告)号：CA2091909A1

公开(公告)日：1994-01-11

申请号：CA2091909

申请日：1993-03-18

Applicant: IBM

Inventor： BARD STEVEN L ,  JONES JEFFREY D ,  KATYL ROBERT H ,  MOORE RONALD J ,  MORENO OSCAR A

IPC: B05C5/02 ,  B05D1/36 ,  B08B3/02 ,  C23F1/08 ,  F26B21/00 ,  H01L21/304 ,  H05K3/00 ,  H05K3/22 ,  H05K3/26

Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.