Patent search ap:("IBM") AND inv:"PHILPOTT MICHAEL RONALD" Page 1

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发明专利
METHOD OF MONITORING THE THICKNESS OF THIN DIELECTRIC FILMS AND PERFORMANCE OF THE METHOD 未知

公开(公告)号：DE3061488D1

公开(公告)日：1983-02-03

申请号：DE3061488

申请日：1980-04-25

Applicant: IBM

Inventor： GORDON II JOSEPH GROVER , PHILPOTT MICHAEL RONALD , SWALEN JEROME DOUGLAS

IPC: G01B11/06 , G01N21/55 , G01N21/86 , G11B5/84

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