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公开(公告)号：US3273030A
公开(公告)日：1966-09-13
申请号：US33451763
申请日：1963-12-30
Applicant: IBM
Inventor： PIETER BALK , PILKUHN MANFRED H
IPC: H01L29/267 , H01L29/43 , H01L29/778
CPC classification number: H01L29/267 , H01L29/432 , H01L29/778 , H01L29/7787
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