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公开(公告)号：FR2275027A1
公开(公告)日：1976-01-09
申请号：FR7514039
申请日：1975-04-29
Applicant: IBM
Inventor： POGGE HANS B , POPONIA MICHAEL R
IPC: H01L27/00 , C25F3/12 , H01L21/00 , H01L21/306 , H01L21/316 , H01L21/76 , H01L21/762
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