METHOD FOR FORMING ALIGNMENT PATTERN ON SURFACE BY USING PARTICLE BEAM USEFUL FOR LIQUID CRYSTAL

    公开(公告)号:JPH1096928A

    公开(公告)日:1998-04-14

    申请号:JP11724297

    申请日:1997-05-07

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a method for forming patterned alignment directions on an alignment surface for a liquid crystal display cell. SOLUTION: This cell is formed by forming a first alignment direction on the alignment surface, such as its polyimide surface. A second alignment direction is formed on the alignment surface. The first and second alignment directions are formed by various kinds of processing sequence. An example of the first sequence is a first step for polishing the alignment surface, then a second step of selectively exposing (preferably by using a mask) the alignment surface with respect to the processing selected from the group of the exposure to electromagnetic radiations and exposure to the particle beams. Another example of the sequence is a first step for exposing the alignment surface with respect to the processing selected from a group of the electromagnetic radiation and the particle beams, then a second step for selectively exposing (preferably by passing through mask) the alignment surface to the other beams.

    ALIGNMENT OF LIQUID CRYSTAL BY ATOMIC BEAM

    公开(公告)号:JPH1096927A

    公开(公告)日:1998-04-14

    申请号:JP11716297

    申请日:1997-05-07

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a method for aligning liquid crystals on a polyimide surface exposed to low-energy and neutral argon ion beams. SOLUTION: The energy of incident ions is changed between 75eV and 500eV and the integrated current density is changed from 100μA/cm to 500mA/cm . The incident angle at which alignment is measured is changed between 10 deg. and 80 deg.. The pretilt angle of the liquid crystals is changed between 0 deg. and 8 deg. by contolling treatment condition. The degradation of the polyimide to introduce charge transfer is averted by operation with a low acceleration voltage.

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