公开(公告)号：DE2962243D1

公开(公告)日：1982-04-01

申请号：DE2962243

申请日：1979-11-27

Applicant: IBM

Inventor： KIRK JOSEPH PENNELL ,  PREDATSCH JOSEF ,  SU LO-SOUN

IPC: G01B11/00 ,  G01B11/02 ,  G01B11/30 ,  G01B11/14

Abstract: 1. An optical measuring device for determining the spacing between edge-shaped structures on surfaces, especially of line widths, characterized in that focused light from a source (18) is moved along a line across the surface (12) to be tested and the light scattered at the edges is detected by means of two photodetectors (60, 62) arranged symmetrically to the optical axis, and that an electronic evaluator circuit (70) is provided for determining the desired spacing between two edge-shaped structures from the position of the peaks of the signals generated by the two photodetectors.