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公开(公告)号:JPS554991A
公开(公告)日:1980-01-14
申请号:JP6056379
申请日:1979-05-18
Applicant: IBM
Inventor: REIMONDO DABURIYUU ANJIERO , RICHIYAADO EMU PORIYATSUKU , JIYON AARU SASUKO
IPC: H01L21/312 , H01L21/56 , H01L23/29 , H01L23/31 , H05K3/28