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公开(公告)号:JPS5277594A
公开(公告)日:1977-06-30
申请号:JP14135876
申请日:1976-11-26
Applicant: IBM
Inventor: SABUBASU JIYOOJIA CHIYANBAREIN , ROORENSU GURIFUISU HERAA
IPC: H01L31/10 , H01L31/113