公开(公告)号：DE2703472A1

公开(公告)日：1977-08-04

申请号：DE2703472

申请日：1977-01-28

Applicant: IBM

Inventor： LIN BURN JENG ,  MENTESANA JOHN SEBASTIAN ,  SANTY WILLIAM GODFREY ,  WILCZYNSKI JANUSZ STANISLAW

IPC: H01L21/027 ,  G03B27/20 ,  G03F7/20 ,  H01L21/683 ,  H01L21/68

Abstract: A jig for positioning an image mask and image receiving medium which includes a housing having a central bore, first means within the bore for supporting a mask or image receiving medium, a flexible diaphragm, second means for drawing vacuum, and a third means for applying superatmospheric pressure on one side of the diaphragm to deform it towards the first means to ensure proper positioning of the mask and image receiving medium. Also, the process for positioning the mask and image receiving medium is provided.