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公开(公告)号：SE355266B
公开(公告)日：1973-04-09
申请号：SE903769
申请日：1969-06-25
Applicant: IBM
Inventor： MIDDELHOEK S , SASSO G
IPC: C23C14/04 , C23F1/02 , H01L21/00 , H01L21/285 , H01L21/316 , H01L23/29 , H01L29/00 , H01L9/00
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