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公开(公告)号:DE3378372D1
公开(公告)日:1988-12-08
申请号:DE3378372
申请日:1983-05-27
Applicant: IBM
Inventor: MONDOU EUGENE RAYMOND , SCHNEIDER FREDERICK WILLIAM
Abstract: A process for cleaning both polar and non-polar residue material from screening masks, wherein the mask is contacted with a liquid solvent that at least includes a solvent selected from the group consisting of N-cyclohexyl-2-pyrrolidone, N-isopropyl-2-pyrrolidone, ethyl hexyl acetate, dibutyl carbitol and Magie Oil #6543.