Patent search ap:("IBM") AND inv:"SHEN JOHN CHEN" Page 1

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发明专利
Substrate independent superpolishing process and slurry 未知

公开(公告)号：SG47370A1

公开(公告)日：1998-04-17

申请号：SG1995002236

申请日：1994-12-20

Applicant: IBM

Inventor： HARTOG VAN DEN BRENT , FOX DENNIS LEONARD , HAGAN JAMES ALOYSIUS , SHEN JOHN CHEN , VISWANATHAN KANNIMAGNLAM V

IPC: B24B37/00 , C23F1/16 , G01Q60/00 , G11B5/73 , G11B5/82 , G11B5/84 , H01L21/304

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