公开(公告)号：CA1223678A

公开(公告)日：1987-06-30

申请号：CA499555

申请日：1986-01-14

Applicant: IBM

Inventor： SMITH DAVID A ,  WELLS OLIVER C

IPC: H01J37/28 ,  G01N27/00 ,  G12B21/00 ,  H01J37/26

Abstract: LOW-ENERGY SCANNING TRANSMISSION ELECTRON MICROSCOPE Low-energy scanning transmission electron microscopy is achieved by using a sharply pointed electrode as a source of electrons having energies less than 10 eV and scanning the electron emitting pointed source across the surface of a self-supported thin film of material to be investigated at an essentially constant distance on the order of nanometers. The electrons transmitted through the specimen are sensed by a suitable detector and the output signal of the detector is used to control a display unit, such as a CRT display or a plotter. A scanning signal generating means simultaneously controls both the scanning of the electron emitting point source and the display unit while a separation control unit holds the distance between the point source and surface at a constant value. The electron emitting point source and associated mechanical drives as well as the specimen film and electron detector are all positioned in a vacuum chamber and isolated from vibration by a damped suspension apparatus.