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公开(公告)号：US3480879A
公开(公告)日：1969-11-25
申请号：US3480879D
申请日：1968-01-04
Applicant: IBM
Inventor： NATHAN MARSHALL I , SMITH JOHN E JR
CPC classification number: H01L47/026
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公开(公告)号：CA861689A
公开(公告)日：1971-01-19
申请号：CA861689D
Applicant: IBM
Inventor： NATHAN MARSHALL I , SMITH JOHN E JR
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