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公开(公告)号：JPS58148445A
公开(公告)日：1983-09-03
申请号：JP21848082
申请日：1982-12-15
Applicant: IBM
IPC: H01L29/80 , H01L21/8238 , H01L27/08 , H01L27/092 , H01L27/12 , H01L29/49 , H01L29/78 , H01L29/786
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