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公开(公告)号:DE2442309A1
公开(公告)日:1975-05-22
申请号:DE2442309
申请日:1974-09-04
Applicant: IBM
Inventor: HANSEN HOWARD EUGENE , STRAUB ROBERT JOSEPH , TUCZYNSKI EDWAD MARTIN
IPC: H01L21/304 , F26B21/00 , H01L21/00 , F26B5/00
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公开(公告)号:DE1640535B1
公开(公告)日:1970-11-26
申请号:DE1640535
申请日:1967-06-23
Applicant: IBM
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