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公开(公告)号：BR8802944A
公开(公告)日：1990-01-23
申请号：BR8802944
申请日：1988-06-16
Applicant: IBM
Inventor： GAJDA JOSEPH JOHN , SRIKRISHNAN KRIS VEKATRAMAN , TOTTA PAUL ANTHONYH , TRUDEAU FRANCIS GEORGE
IPC: H01L21/3205 , H01L21/60 , H01L21/768 , H01L23/485 , H01L23/522 , H01L21/28
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