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公开(公告)号：DE2453578A1
公开(公告)日：1975-07-10
申请号：DE2453578
申请日：1974-11-12
Applicant: IBM
Inventor： BAKER THEODORE HARRIS , STEVENS RICHARD CHARLES , TZOU ALBERT JI-SHOU
IPC: H01L21/66 , G01R27/02 , G01R31/26 , H01L21/027 , H01L21/28
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