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公开(公告)号:DE69104082T2
公开(公告)日:1995-03-30
申请号:DE69104082
申请日:1991-02-12
Applicant: IBM
Inventor: HILDENBRAND WALTER WILLIAM , UTTERBACK STEVEN GREGG
IPC: H01J37/244 , H01J37/28 , H01L21/66
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公开(公告)号:DE69104082D1
公开(公告)日:1994-10-27
申请号:DE69104082
申请日:1991-02-12
Applicant: IBM
Inventor: HILDENBRAND WALTER WILLIAM , UTTERBACK STEVEN GREGG
IPC: H01J37/244 , H01J37/28 , H01L21/66
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