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公开(公告)号：JPS62105444A
公开(公告)日：1987-05-15
申请号：JP19300186
申请日：1986-08-20
Applicant: IBM
Inventor： NOBLE JR WENDELL P , SCHEUERLEIN ROY E , WALKER WILLIAM W
IPC: H01L21/76 , H01L21/033 , H01L21/265 , H01L21/762 , H01L27/10 , H01L27/105
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