公开(公告)号：DE3368981D1

公开(公告)日：1987-02-12

申请号：DE3368981

申请日：1983-05-02

Applicant: IBM

Inventor： STROPE DOUGLAS HOWARD ,  WRAY THOMAS EDWARD

IPC: G01N27/72 ,  G01B7/00 ,  G01B7/06 ,  G01R33/12

Abstract: A conductive film deposition rate monitoring method for measuring the real time deposition rate of a metallic deposition process particularly an electroless plating bath, including the steps of positioning an eddy current detector within a predetermined distance of a test surface where the deposition is to be deposited, and the step of monitoring the output of the detector. The apparatus comprises an eddy current sensor and a non-metallic housing for the sensor, having a non-conductive wall of predetermined thickness between the sensor and the surface of the wall distant from the sensor, the distant wall being immersed in the deposition environment, such as a plating bath, so that a deposit takes place on the distant surface, and measuring means connected to the output of the sensor for measuring the amplitude and rate of change of the output of the sensor.