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公开(公告)号:CA997074A
公开(公告)日:1976-09-14
申请号:CA190766
申请日:1974-01-23
Applicant: IBM
Inventor: ARTONSTEIN JESSE , HARDING WILLIAM E , ZEISS PHILIP M
IPC: B23Q41/00 , B23Q41/06 , G05B15/02 , G05B19/418 , H01L21/027 , H01L21/50 , H01L29/78
公开(公告)号:CA997074A
公开(公告)日:1976-09-14
申请号:CA190766
申请日:1974-01-23
Applicant: IBM
Inventor: ARTONSTEIN JESSE , HARDING WILLIAM E , ZEISS PHILIP M
IPC: B23Q41/00 , B23Q41/06 , G05B15/02 , G05B19/418 , H01L21/027 , H01L21/50 , H01L29/78