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公开(公告)号：DE102006002940A1
公开(公告)日：2006-10-19
申请号：DE102006002940
申请日：2006-01-21
Applicant: IBM , INFINEON TECHNOLOGIES AG
Inventor： KUDELKA STEPHAN , SETTLEMEYER KENNETH , TEWS HELMUT
IPC: H01L21/8242
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