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公开(公告)号：DE1769327A1
公开(公告)日：1972-03-02
申请号：DE1769327
申请日：1968-05-09
Applicant: IBM DEUTSCHLAND
Inventor： EBERT ECKEHARD , HEINEMANN ALFRED
IPC: C30B25/02 , H01L21/205 , B01J17/32
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