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公开(公告)号：DE2326447A1
公开(公告)日：1974-12-12
申请号：DE2326447
申请日：1973-05-24
Applicant: IBM DEUTSCHLAND
Inventor： BECK WOLFGANG , BRUNNER FRIEDRICH C DIPL CHEM , FRASCH PETER ULI , IVANCIC BLANKA , SCHWERDT FRIEDRICHWILHELM , VOGTMANN THEODOR
IPC: H05K3/06 , C23F1/44 , G03F7/42 , H01L21/027 , H01L21/30 , H01L21/308 , H01L21/311 , C23G5/00
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