公开(公告)号：DE3162343D1

公开(公告)日：1984-03-29

申请号：DE3162343

申请日：1981-04-28

Applicant: IBM DEUTSCHLAND ,  IBM

Inventor： HAUSLER GERD DR ,  JARISCH WALTER DR

IPC: G01M11/00 ,  G01M11/02 ,  G02B27/60

公开(公告)号：DE3174649D1

公开(公告)日：1986-06-19

申请号：DE3174649

申请日：1981-11-25

Applicant: IBM DEUTSCHLAND ,  IBM

Inventor： HAUSLER GERD DR ,  JARISCH WALTER DR ,  MAKOSCH GUNTER

IPC: G01B9/02 ,  G01B11/24 ,  G01J9/02 ,  G02B27/00 ,  G02B27/50 ,  G02B27/10

公开(公告)号：DE3169941D1

公开(公告)日：1985-05-23

申请号：DE3169941

申请日：1981-04-28

Applicant: IBM DEUTSCHLAND ,  IBM

Inventor： HAUSLER GERD DR ,  JARISCH WALTER DR ,  MAKOSCH GUNTER

IPC: G01B9/02 ,  G01M11/00 ,  G01M11/02

Abstract: Optical imaging systems are used for making microstructures, and have to be very precise. In order to test these imaging systems, a new method, and a device for carrying out this method, are described in which two interferograms are made and compared. In a first step, an interferogram of an original pattern is made, followed by a second step in which an interferogram of a copy of the original pattern is produced using the identical conditions used to form the first interferogram. The pattern copy is made in the imaging system to be tested. In a third step, the two interferograms are compared with one another to provide a measure of the accuracy of the imaging system. This technique can be used for testing imaging systems which produce only a mirror image.