公开(公告)号：US20180047560A1

公开(公告)日：2018-02-15

申请号：US15674151

申请日：2017-08-10

Applicant: IMEC VZW

Inventor： Paul Mertens

IPC: H01L21/02 ,  B08B3/08 ,  B08B3/10 ,  B81C1/00

CPC classification number: H01L21/02057 ,  B08B3/08 ,  B08B3/10 ,  B81C1/00849 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/67051 ,  H01L21/67057 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/67742 ,  H01L29/785

Abstract: A method for performing a wet treatment of a structure is described in the present disclosure. An example method includes obtaining a structure comprising a first surface, wherein the first surfaces comprises a feature fixed at least at a first end to the first surface from which it protrudes, and wherein a sidewall of the feature faces and is positioned away from a second surface by a gap g, performing a wet treatment of the structure and subsequently, drying the structure, wherein performing the wet treatment comprises rinsing the structure by exposing it to a rinsing liquid comprising water, and exposing the structure, subsequently, to a sequence of liquids.