公开(公告)号：EP4389279A1

公开(公告)日：2024-06-26

申请号：EP22215471.8

申请日：2022-12-21

Applicant: Imec VZW

Inventor： Zhang, Lei ,  Severi, Simone ,  Stakenborg, Tim ,  Labie, Riet ,  Soussan, Philippe ,  Karve, Gauri

IPC: B01L3/00

CPC classification number: B01L3/502707 ,  B01L2200/02520130101 ,  B01L2300/064520130101 ,  B01L2300/087420130101 ,  B01L2300/088720130101 ,  B01L2300/066320130101

Abstract: According to an aspect of the present inventive concept there is provided a microfluidic device comprising: at least one structure arranged in a pocket-defining layer defining a pocket in the pocket-defining layer; a semiconductor chip arranged in the pocket, the semiconductor chip comprising at least one electrode at the surface of the semiconductor chip; an electrical connection layer arranged above the semiconductor chip, wherein the electrical connection layer comprises electronic connections electrically connected to the at least one electrode and arranged to extend laterally in the electrical connection layer away from the semiconductor chip; at least one fluidic channel extending through the pocket-defining layer and above the semiconductor chip, the fluidic channel being arranged to be in fluidic communication with the at least one electrode.

公开(公告)号：EP2977606A1

公开(公告)日：2016-01-27

申请号：EP14178482.7

申请日：2014-07-25

Applicant: IMEC VZW

Inventor： Andrei, Alexandru ,  Severi, Simone

IPC: F04B19/00 ,  F04B43/00 ,  H01L21/00 ,  G01N21/00 ,  B01L3/00 ,  B01L9/00

CPC classification number: B01L3/502707 ,  F04B19/00

Abstract: A microfluidic device and method of manufacturing thereof are disclosed. In one embodiment, the microfluidic device includes a fluidic channel encapsulated in a solid container. Further, one wall of the fluidic channel is formed by an oxide. Furthermore, a surface of the solid container includes a first recess down to the oxide thereby allowing optical inspection of a fluid sample in the fluidic channel via the first recess, through the oxide.

Abstract translation: 公开了一种微流体装置及其制造方法。 在一个实施例中，微流体装置包括封装在固体容器中的流体通道。 此外，流体通道的一个壁由氧化物形成。 此外，固体容器的表面包括向下到氧化物的第一凹部，从而允许经由第一凹部通过氧化物光学检查流体通道中的流体样品。