公开(公告)号：US09970754B2

公开(公告)日：2018-05-15

申请号：US15249298

申请日：2016-08-26

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chia-Hung Cho ,  Kai-Ping Chuang ,  Yi-Wei Chang

IPC: G01B11/30 ,  G01B11/06 ,  B24B37/20

CPC classification number: G01B11/303 ,  B24B37/20 ,  G01B11/0608

Abstract: A surface measurement device includes a rotating platform, a motion lever, a measuring module and a control module. The rotating platform rotates an object at a rotating speed. The motion lever is above the rotating platform. The measuring module moves to a variety of measuring positions on the motion lever. When the measuring module is at one of the measuring positions, the measuring module measures the heights of a plurality of sampling points on the surface of the object in a sampling frequency. The control module selectively modifies the rotating speed of the rotating platform or the sampling frequency of the measuring module according to the measuring position of the measuring module to make the distance between the sampling points in at least a region of the surface of the object match a sampling rule.