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公开(公告)号:US10976151B2
公开(公告)日:2021-04-13
申请号:US16232689
申请日:2018-12-26
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Yuan Chin Lee , Ting Wei Chang , Chi Shen Chang , Chy Lin Wang
Abstract: An optical interferometer includes a beam splitter module and an optical sensor. The beam splitter module includes a lens assembly and a splitter cube. A light incident surface of the splitter cube is substantially orthogonal to an optical axis of the lens assembly. An acute angle is between the light incident surface and a light splitting surface of the splitter cube. A sampling surface of the splitter cube is substantially parallel to the light incident surface. A light reflecting surface of the splitter cube is substantially orthogonal to the light incident surface. The light incident surface is closer to the lens assembly than the sampling surface. A reference arm is defined between a splitter position on the light splitting surface and the light reflecting surface, a sample arm is defined between the splitter position and the sampling surface, and the reference arm is longer than the sample arm.
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公开(公告)号:US11583169B2
公开(公告)日:2023-02-21
申请号:US16987744
申请日:2020-08-07
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Chun-Chieh Huang , Yuan Chin Lee , Chi Shen Chang , Hung Chih Chiang
Abstract: An optical fiber scanning probe includes a rotor and at least one optical fiber. The rotor includes a torque rope rotatable about its central axis. The optical fiber is disposed on the rotor and eccentric relative to the torque rope. A central axis of the optical fiber is substantially parallel to the central axis of the torque rope. When the torque rope rotates about its central axis, the rotor brings a free end of the optical fiber to scan along an arc path.
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