公开(公告)号：DE60039432D1

公开(公告)日：2008-08-21

申请号：DE60039432

申请日：2000-07-13

Applicant: ION GEOPHYSICAL CORP

Inventor： YU DULI ,  YU LIANZHONG ,  GOLDBERG HOWARD D ,  SCHMIDT MARTIN A ,  RIED ROBERT P

IPC: G02B7/182 ,  G02B26/10 ,  B81B3/00 ,  G02B26/08 ,  G06K7/10

Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.

公开(公告)号：NO334310B1

公开(公告)日：2014-02-03

申请号：NO20014464

申请日：2001-09-14

Applicant: ION GEOPHYSICAL CORP

Inventor： SCHMIDT MARTIN A ,  GOLDBERG HOWARD D ,  IP MATTHEW ,  SELVAKUMAR ARJUN ,  YU DULI ,  MARSH JAMES L ,  FUNG BING-FAI ,  SIMON PHILIP

IPC: G01P15/08 ,  G01P21/00 ,  B81B7/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00

公开(公告)号：NO326146B1

公开(公告)日：2008-10-06

申请号：NO20020140

申请日：2002-01-11

Applicant: ION GEOPHYSICAL CORP

Inventor： SCHMIDT MARTIN A ,  GOLDBERG HOWARD D ,  YU DULI ,  YU LIANZHONG ,  RIED ROBERT P

IPC: G02B7/182 ,  G02B26/10 ,  B81B3/00 ,  G02B26/08 ,  G06K7/10

Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.