公开(公告)号：NO335756B1

公开(公告)日：2015-02-09

申请号：NO20014460

申请日：2001-09-14

Applicant: ION GEOPHYSICAL CORP

Inventor： BEHN LAWRENCE P ,  MAXWELL PETER ,  RUSHEFSKY LARRY ,  SIGMAR AXEL ,  GOLDBERG HOWARD D ,  STALNAKER W MARC ,  RINNE RAY ,  BALDERES DEMETRIOS ,  LEMKE AL ,  IP MATTHEW ,  DOMAGALSKI KLAUS ,  YU LIANZHONG ,  SELVAKUMAR ARJUN ,  YU DULI ,  MARSH JAMES L ,  MORGAN DAVID ,  BUIE THOMAS ,  FABER KEES ,  ALTMAN SJOERD ,  LAROO RICHARD

IPC: G01D11/24 ,  G01P21/00 ,  G01D18/00 ,  G01D21/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00

Abstract: Sensor (104) som omfatter flere sensorpakker (405), hver med en hovedakse (415, 420, 425) for maksimal følsomhet og anordnet i sin respektive retning i rommet, forskjellig fra hovedaksens retning for de øvrige sensorpakker. Sensorpakkene omfatter et hus (205), et eller flere sensorelementer (544, 546, 548), en lokksammenstilling (506) og en sentral enhet (508), blant annet for styring.

公开(公告)号：NO332471B1

公开(公告)日：2012-09-24

申请号：NO20014469

申请日：2001-09-14

Applicant: ION GEOPHYSICAL CORP

Inventor： GOLDBERG HOWARD D ,  STALNAKER W MARC ,  SELVAKUMAR ARJUN ,  YU DULI ,  MARSH JAMES L

IPC: G01P21/00 ,  H05K5/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).