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公开(公告)号：JPS5934661A
公开(公告)日：1984-02-25
申请号：JP10946483
申请日：1983-06-20
Applicant: Ibm
Inventor： HAASARAN SHIN BAATEIA , SATEIAPARU SHIN BAATEIA , YAKOBU RAIZUMAN , EMANIYUERU EI BUARUSAMAKISU
IPC: H01L29/73 , H01L21/225 , H01L21/285 , H01L21/331 , H01L23/485 , H01L29/735
CPC classification number: H01L29/735 , H01L21/2257 , H01L21/28525 , H01L23/485 , H01L2924/0002 , H01L2924/00
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