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1.
公开(公告)号:JPS6132566A
公开(公告)日:1986-02-15
申请号:JP10169685
申请日:1985-05-15
Applicant: Ibm
IPC: H01L27/08 , H01L21/761 , H01L27/02 , H01L27/092
CPC classification number: H01L27/0251 , H01L21/761 , H01L27/0925
公开(公告)号:JPS6132566A
公开(公告)日:1986-02-15
申请号:JP10169685
申请日:1985-05-15
Applicant: Ibm
IPC: H01L27/08 , H01L21/761 , H01L27/02 , H01L27/092
CPC classification number: H01L27/0251 , H01L21/761 , H01L27/0925