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公开(公告)号：EP2478955A1
公开(公告)日：2012-07-25
申请号：EP10817303.0
申请日：2010-09-17
Applicant: Imagineering, Inc.
Inventor： IKEDA Yuji , KANEKO Hitoe , KAWASHIMA Motoki
CPC classification number: B01D53/323 , B01D53/32 , B01D2257/708 , B01D2259/818 , H05H1/46 , H05H2001/463 , H05H2245/121
Abstract: A plasma generation device, including: an ionization unit that ionizes gas in a target space; an electromagnetic wave oscillator that oscillates an electromagnetic wave to be radiated to the target space; and an antenna that radiates the electromagnetic wave supplied from the electromagnetic wave oscillator to a gas ionization region in which gas ionized by the ionization unit is provided. The ionization unit ionizes gas and the antenna radiates the electromagnetic wave thereto to generate plasma. A plurality of strong electric field regions are formed around the antenna when the electromagnetic wave is supplied from the electromagnetic wave oscillator. The strong electric field region is a region stronger in electric field than the surrounding area. The ionization unit ionizes gas around the plurality of strong electric field regions, or gas around a plurality of regions in which immediately before strong electric fields come into existence.
Abstract translation: 一种等离子体产生装置，包括：离子化单元，其使目标空间中的气体电离; 振荡要辐射到目标空间的电磁波的电磁波振荡器; 以及将从电磁波振荡器供给的电磁波照射到由离子化单元离子化的气体的气体电离区域的天线。 电离单元使气体离子化，并且天线辐射电磁波以产生等离子体。 当从电磁波振荡器提供电磁波时，在天线周围形成多个强电场区域。 强电场区域是电场比周边区域更强的区域。 离子化单元将多个强电场区域周围的气体或围绕强电场之前的多个区域周围的气体电离。
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公开(公告)号：EP2478955B1
公开(公告)日：2016-11-23
申请号：EP10817303.0
申请日：2010-09-17
Applicant: Imagineering, Inc.
Inventor： IKEDA Yuji , KANEKO Hitoe , KAWASHIMA Motoki
IPC: H05H1/46
CPC classification number: B01D53/323 , B01D53/32 , B01D2257/708 , B01D2259/818 , H05H1/46 , H05H2001/463 , H05H2245/121
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